Optical displacement meter

An optical displacement meter comprising:

• a light projection unit that irradiates a workpiece performing a relative movement in a direction intersecting an X direction with slit light extending in the X direction;
• an image sensor that includes a plurality of pixels, receives reflected light reflected from the workpiece by the plurality of pixels, and outputs a light reception image indicating a light receiving amount distribution, the plurality of pixels being two-dimensionally arranged in a U direction corresponding to the X direction and a V direction orthogonal to the U direction;
• and
• a control unit that generates profile data of the workpiece based on the light reception image and measures a shape of the workpiece based on the profile data,
• wherein the control unit
• controls the image sensor to sequentially acquire a plurality of the light reception images along with the relative movement,
• detects a peak position candidate in the V direction for each of positions in the U direction based on the light receiving amount distribution of the light reception image for each of the light reception images,
• converts UV coordinate information including each of the positions in the U direction and the peak position candidate in the V direction at each of the positions in the U direction and information regarding the relative movement into XYZ coordinate information including a peak position candidates in a Z direction corresponding to each of XY coordinates based on a predetermined coordinate conversion condition,
• for each position in the X direction of the XYZ coordinate information,
• generates one or more clusters including a plurality of peak position candidates selected in such a manner that a distance between a peak position candidate at any one position in the Y direction and a peak position candidate at another position in the Y direction is equal to or less than a certain value,
• determines whether noise is included in the cluster based on an inclination of the cluster with respect to the Y direction, and
• generates the profile data based on a result of the determination.