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US 2025/0321508 A1Published application
Lens rebuilding system and method of rebuilding damaged lens in lithography tool
AssigneesTaiwan Semiconductor Manufacturing Company, Ltd., Tsmc China Company Limited
InventorsXianhui ZHOU, Lei WANG, Zihao ZHANG
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Abstract
A method includes removing a damaged lens from a lithography tool; generating an initial profile of a new lens based on a surface profile of the damaged lens; optimizing the initial profile of the new lens by simulating an optical property of the new lens in the lithography tool to generate an optimized profile; fabricating the new lens based on the optimized profile; and mounting the new lens in the lithography tool in place of the damaged lens.
Claims20
A method, comprising:
- removing a damaged lens from a lithography tool;
- generating an initial profile of a new lens based on a surface profile of the damaged lens;
- optimizing the initial profile of the new lens by simulating an optical property of the new lens in the lithography tool to generate an optimized profile;
- fabricating the new lens based on the optimized profile;
- and
- mounting the new lens in the lithography tool in place of the damaged lens.
3 more elements
A method, comprising:
- removing a damaged lens from a lithography tool;
- generating a profile of a new lens based on a surface profile of the damaged lens;
- fabricating the new lens based on the profile, wherein fabricating the new lens comprises:
- shaping a workpiece;
- performing a coarse polish to the workpiece;
- performing a fine polish to the workpiece, wherein the fine polish is a noncontact-type polishing method;
- and
- coating the workpiece;
- and
- mounting the new lens in the lithography tool in place of the damaged lens.
7 more elements
A lens rebuilding system, comprising:
- a processor configured to generate a profile of a new lens based on a surface profile of a damaged lens;
- and
- a lens manufacturing tool configured to fabricate the new lens based on the profile, wherein the lens manufacturing tool comprises:
- a coarse polishing tool configured to perform a first polishing on a work piece of the new lens using a rotating polisher;
- and
- a fine polishing tool configured to perform a second polishing on the work piece of the new lens using focused ion beam.
3 more elements
Dependencies are inferred from the claim text.