Substrate processing apparatus and gas supply method
AssigneeTokyo Electron Limited
InventorsNaoki TAJIMA, Masashi TSUCHIYAMA
Life of this patent
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Abstract
A substrate processing apparatus includes at least one processing unit configured to process a substrate, a transfer area in which a transfer unit configured to transfer the substrate to the at least one processing unit, a duct configured to supply air supplied from an air source to the at least one processing unit, an intake supply configured to intake ambient air around the substrate processing apparatus to supply the air to the transfer area; and a supply pipe configured to connect the duct and the intake supply so that the air supplied from the air source, which flows through the duct, is supplied to the transfer area.
Claims16
A substrate processing apparatus comprising:
- at least one processing unit configured to process a substrate;
- a transfer area in which a transfer unit configured to transfer the substrate to the at least one processing unit;
- a duct configured to supply air supplied from an air source to the at least one processing unit;
- an intake supply configured to intake ambient air around the substrate processing apparatus to supply the air to the transfer area;
- and
- a supply pipe configured to connect the duct and the intake supply so that the air supplied from the air source, which flows through the duct, is supplied to the transfer area.
A method of intaking ambient air around a substrate processing apparatus to supply the air to a transfer area,
- wherein the substrate processing apparatus includes a processing unit configured to process a substrate, the transfer area in which a transfer unit configured to transfer the substrate to the processing unit is provided, and a duct configured to supply air supplied from an air source to the processing unit,
- the method comprising:
- mixing air not supplied to the processing unit out of the air flowing through the duct with the ambient air intaken from around the substrate processing apparatus to supply a mixed air to the transfer area.
Dependencies are inferred from the claim text.