Method for obtaining a tilt series of images of a sample at a plurality of tilt angles

Abstract

A method and charged particle microscope for obtaining a tilt series of images based on exposure of a region of interest of a sample to a charged particle beam at a plurality of tilt angles. The method comprises the step of tracking a field of view (FOV) during the step of obtaining the tilt series of images. The method comprises the step of producing a tomographic image of a sample volume related to said region of interest based on at least some images of the obtained tilt series. As defined herein, the step of tracking the field of view (FOV) comprises the step of exposing a tracking region that is substantially outside of said region of interest (ROI). The charged particle microscope as defined herein is arranged for performing the method as defined herein.

Dependencies are inferred from the claim text.