Coated substrate
AssigneeNiterra Co., Ltd.
InventorTomoki MURATA
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Abstract
A novel coated substrate which can be applied to various fields and can be mass-produced is provided. A coated substrate has a substrate coated with a film. The thickness of the film is 1 nm or greater and less than 800 nm. X-ray photoelectron spectroscopic measurement of the film shows that the percent element composition of C (carbon) is 0.1 atm % or greater and less than 20 atm %, and the total percent element composition of a metal element and O (oxygen) is 70 atm % or greater. The relative density of the film is 90% or greater. The film is amorphous.
Claims5
A coated substrate in which a substrate is coated with a film, wherein the thickness of the film is 1 nm or greater and less than 800 nm,
- x-ray photoelectron spectroscopic measurement of the film shows that the percent element composition of C (carbon) is 0.1 atm % or greater and less than 20 atm %, and the total percent element composition of a metal element and O (oxygen) is 70 atm % or greater,
- the relative density of the film is 90% or greater, and
- the film is amorphous.
Dependencies are inferred from the claim text.