Microvalve and Microvalve Array
AssigneeAlbert-Ludwigs-Universität Freiburg
InventorsArdavan Shabanian, Anjan Bhat Kashekodi, Peter Woias, Frank Goldschmidtböing
Life of this patent
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Abstract
A microvalve includes a base body, a deflectable membrane, and an actuating element supported by the base body and contacting the deflectable membrane. The base body has a cavity, at least one first opening, and at least one second opening. Each of the at least one first opening and the at least one second opening extend into the cavity. The deflectable membrane separates the cavity into a first chamber and a second chamber. The deflectable membrane has at least one through-hole extending between the first chamber and the second chamber. The actuating element is operable to deflect the membrane to move between at least two positions.
Claims20
A microvalve, comprising:
- a base body with a cavity, at least one first opening, and at least one second opening, each of the at least one first opening and the at least one second opening extending into the cavity;
- a deflectable membrane, which separates the cavity into a first chamber and a second chamber, the deflectable membrane has at least one through-hole extending between the first chamber and the second chamber;
- and
- an actuating element, which is supported by the base body and contacts the deflectable membrane, the actuating element is operable to deflect the membrane to move between at least two positions.
A microvalve array, comprising:
- at least one microvalve including:
- a base body with a cavity, at least one first opening, and at least one second opening, each of the at least one first opening and the at least one second opening extending into the cavity;
- a deflectable membrane, which separates the cavity into a first chamber and a second chamber, the deflectable membrane has at least one through-hole extending between the first chamber and the second chamber;
- and
- an actuating element, which is supported by the base body and contacts the deflectable membrane, the actuating element is operable to deflect the membrane to move between at least two positions.
Dependencies are inferred from the claim text.