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US 2025/0313985 A1Published application
Manufacturing method of quartz glass crucible
AssigneeSumco Corporation
InventorsMasami OHARA, Hiroshi KISHI, Eriko KITAHARA
Life of this patent
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Abstract
A manufacturing method of a quartz glass crucible includes: producing a quartz glass crucible by arc-melting raw material quartz powder deposited on an inner surface of a rotating mold; washing an inner surface of the quartz glass crucible with pure water thereby reducing a total concentration of Na, K, and Ca contained in a silica glass around the inner surface as compared to that before washing; and etching the inner surface with washing liquid containing hydrofluoric acid.
Claims6
A manufacturing method of a quartz glass crucible comprising:
- producing a quartz glass crucible by arc-melting raw material quartz powder deposited on an inner surface of a rotating mold;
- washing an inner surface of the quartz glass crucible with pure water thereby reducing a total concentration of Na, K, and Ca contained in a silica glass around the inner surface as compared to that before washing;
- and
- etching the inner surface with washing liquid containing hydrofluoric acid.
1 more element
Dependencies are inferred from the claim text.