Cutting method and manufacturing method for chip
AssigneeDisco Corporation
InventorNobuhiko Karashima
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AssigneeDisco Corporation
InventorNobuhiko Karashima
Estimating the term…
A cutting method for cutting a workpiece is provided. This cutting method includes holding the workpiece including a crystal structure having a c-axis inclined with respect to a perpendicular to a surface and a c-plane perpendicular to the c-axis and cutting the workpiece along a planned cutting plane that is perpendicular to the surface and is inclined with respect to the c-plane by rotating a cutting blade having an annular cutting edge and making a tip portion of the cutting edge cut into the workpiece. In the cutting the workpiece, the tip portion is made to cut into the workpiece in a state in which a force in such an orientation as to bring an angle formed by the planned cutting plane and the tip portion close to 0° acts on the cutting edge from the workpiece when the tip portion is made to cut into the workpiece.
A cutting method for cutting a workpiece, the cutting method comprising:
A manufacturing method for a chip in which a workpiece is split to manufacture the chip, the manufacturing method comprising:
Dependencies are inferred from the claim text.