Pip structure and manufacturing methods of high voltage device and capacitor device having pip structure
AssigneeRichtek Technology Corporation
InventorsChin-Chin Tsai, Yong-Zhong Hu
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AssigneeRichtek Technology Corporation
InventorsChin-Chin Tsai, Yong-Zhong Hu
Estimating the term…
A polysilicon-insulator-polysilicon (PIP) structure includes: a first polysilicon region formed on a substrate; a first insulation region formed outside one side of the first polysilicon region and adjoined to the first polysilicon region in a horizontal direction; and a second polysilicon region formed outside one side of the first insulation region. The first polysilicon region, the first insulation region and the second polysilicon region are adjoined in sequence in the horizontal direction. The second polysilicon region is formed outside the first insulation region by a first self-aligned process step, and the first insulation region is formed outside the first polysilicon region by a second self-aligned process step.
A polysilicon-insulator-polysilicon (PIP) structure comprising:
13-25. (canceled)
Dependencies are inferred from the claim text.