Sample inspection system

Abstract

A sample inspection system includes: a charged particle beam device irradiating a sample with a charged particle beam to acquire an image of the sample; an overall control device controlling the charged particle beam device; a magnetic shield that configures an internal space for accommodating the charged particle beam device and the overall control device and blocks an external magnetic field; and an air cooling device that takes air into the magnetic shield to cool the internal space of the magnetic shield. The magnetic shield includes highly conductive material layers and high-permeability material layers, and includes an air inlet of the air for cooling in each of the highly conductive material layers and the high-permeability material layers, and a gap that is a spatial clearance is provided between the highly conductive material layer and the high-permeability material layer in a portion where the air inlet is present.

Dependencies are inferred from the claim text.