Method, system and apparatus for teaching and verifying end station

A system to position a substantially circular workpiece having a center on an electrostatic chuck of a processing station having a geometric center location (E), the system comprising:

• one or more memory circuits comprising an executable code;
• one or more central processing units (CPU) in communication with the memory circuits, the one or more CPUs configured to execute the code, causing the system to:
• place the workpiece at a first position on the chuck to determine a first workpiece center location (W1) with respect to the center location (E);
• rotate the workpiece by an angle (θ) in relation to the center location (E) to identify a first counter location (W1′), the distance between W1 and W1′ defining a first Eccentricity (Eccen. #1);
• relocate the workpiece to a second position at a predefined distance (ΔR) from W1 to thereby identify a second workpiece center location (W2);
• rotate the workpiece by the angle (θ) in relation to the center location (E) to identify a second counter location (W2′), the distance between W2 and W2′ defining a second Eccentricity (Eccen. #2);
• calculate the center location (E) as a function of one or more of W1, W2, Eccen. #1 and Eccen. #2.