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US 2025/0282017 A1Published application
Polishing apparatus, polishing method, and polishing head
AssigneeEbara Corporation
InventorsKeisuke UCHIYAMA, Kenji KODERA
Life of this patent
Estimating the term…
Abstract
A polishing apparatus capable of removing a chipping is disclosed. The polishing apparatus includes a first polishing head and a second polishing head. The first polishing head is configured to press a first polishing tool against a peripheral portion of a substrate to form a recess in the peripheral portion. The second polishing head is configured to press a second polishing tool against a polishing boundary of the recess.
Claims19
A polishing apparatus comprising:
- a first polishing head configured to hold a first polishing tool having a first angle as an acute angle;
- and
- a second polishing head configured to hold a second polishing tool having a second angle as a right angle or an obtuse angle, and
- wherein the first polishing head is configured to press the first polishing tool against a peripheral portion of a substrate to form a recess in the peripheral portion, and
- wherein the second polishing head is configured to press the second polishing tool against a polishing boundary of the recess.
2 more elements
A polishing method comprising:
- pressing a first polishing tool having a first angle as an acute angle against a peripheral portion of a substrate by a first polishing head to form a recess in the peripheral portion;
- and
- pressing a second polishing tool having a second angle as a right angle or obtuse angle against a polishing boundary of the recess by a second polishing head.
A polishing head comprising:
- a pressing member for pressing a polishing tape against a peripheral portion;
- an immediately preceding guide roller disposed upstream of the pressing member in a conveying direction of the polishing tape and disposed adjacent to the pressing member;
- and
- an immediately preceding guide roller actuator configured to move the immediately preceding guide roller, and
- wherein the immediately preceding guide roller actuator is configured to:
- move the immediately preceding guide roller until a tape angle of the polishing tape becomes a first angle as an acute angle;
- and
- move the immediately preceding guide roller until the tape angle becomes a second angle as a right angle or an obtuse angle.
5 more elements
Dependencies are inferred from the claim text.