Measurement device and measurement method

Abstract

There is provided a measurement device including a flow channel which includes a main inlet and a main outlet; a pump which supplies a fluid containing a radical precursor to the main inlet of the flow channel; a radical generation unit which generates a radical from the radical precursor in a radical generation region in the flow channel; and a measurement unit which measures a measurement value depending on a concentration of the radical at at least one measurement position which exists toward the main outlet relative to the radical generation region in the flow channel. In the measurement device described above, the radical generation unit may generate the radical by applying at least one of a voltage, heat, light, or an electron beam to the fluid containing the radical precursor.

Dependencies are inferred from the claim text.