Positioning method, press-fitting apparatus, pin processing method, exposure apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsTAKESHI IMAMURA, ISAMU OKUMA, AKIRA YAJIMA, SHOZO MAKITA, TSUYOSHI YAMAMOTO, NAOKI FUNABASHI, WATARU YAMAGUCHI, TOMOTAKA ABE
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Abstract
Disclosed is a method for positioning a second member with respect to a first member, including deforming a pin to form an indentation, press-fitting the deformed pin into a hole in the first member; and abutting the second member against the pin, wherein, when abutting the second member, a center position of a deformed area of the pin is closer to the second member than to a central axis of the pin.
Claims16
A method for positioning a second member with respect to a first member, the method comprising:
- deforming a pin to form an indentation;
- press-fitting the deformed pin into a hole in the first member;
- and
- abutting the second member against the pin,
- wherein, when abutting the second member, a center position of a deformed area of the pin is closer to the second member than to a central axis of the pin.
An apparatus for press-fitting a pin configured to abut a second member, the press-fitting apparatus comprising:
- a holding unit configured to hold the pin;
- a tool configured to deform the pin held by the holding unit;
- and
- a press-fitting unit configured to press-fit the deformed pin into a hole provided in a first member,
- wherein the hole is provided in the first member for positioning the second member with respect to the first member, and
- wherein, when abutting the second member, a center position of a deformed area of the pin by force applied by the tool is closer to the second member than to a central axis of the pin.
An apparatus for press-fitting a pin configured to abut a second member, the press-fitting apparatus comprising:
- a press-fitting unit configured to press-fit a region of the pin into a hole provided in a first member for positioning the second member with respect to the first member, with the region being deformed before the press-fitting;
- and
- a control unit configured to control the press-fitting unit,
- wherein, when abutting the second member, a diameter of the pin at a center position of the region is less than a diameter of the pin at the center position before the pin is deformed, and
- wherein the control unit is further configured to control the press-fitting unit to align the center position of the region closer to the second member than a central axis of the pin.
A method for processing a pin configured to abut a second member, the pin being configured to be press-fitted into a hole provided in a first member to position the second member with respect to the first member, the method comprising:
- deforming the pin,
- wherein, when the second member abuts the first member, a center position of a deformed area of the pin is closer to the second member than to a central axis of the pin.
An exposure apparatus comprising:
- a first member;
- and
- a second member,
- wherein the second member is configured to contact a pin press-fitted into a hole provided in the first member,
- wherein the pin includes a bulged region, and
- wherein, when the second member abuts the first member, a center position of the bulged region is closer to the second member than to a central axis of the pin.
An article manufacturing method comprising:
- deforming a pin;
- press-fitting the deformed pin into a hole provided in a first member;
- positioning a second member with respect to the first member by abutting the second member against the press-fitted pin;
- and
- forming a third member by fixing the first member and the second member,
- wherein the manufactured article includes the third member,
- wherein, when abutting the second member, a center position of a deformed area of the pin is closer to the second member than to a central axis of the pin.
Dependencies are inferred from the claim text.