Methods of determining optical properties of particulate materials using a composite sample and related systems

Abstract

Some embodiments of the present disclosure provide a method of determining optical properties of a particulate material. A first optical model for a matrix material is provided, and a composite sample having a polished surface is provided with the composite sample including a mixture of the particulate material in the matrix material. Spectroscopic ellipsometry is performed on the polished surface of the composite sample to provide spectroscopic ellipsometry data for the composite sample. A second optical model is generated for the particulate material based on the spectroscopic ellipsometry data for the composite sample and based on the first optical model for the matrix material.

Dependencies are inferred from the claim text.