Susceptor with a textured surface
AssigneeApplied Materials, Inc.
InventorsWei-Sheng LEI, Christian GRONET, Anantha K. SUBRAMANI
Life of this patent
Estimating the term…
Abstract
Disclosed herewith are a susceptor, a processing chamber having the susceptor, and a method for making the susceptor. The susceptor includes a body, an upper surface area supported by the body, and a lower surface area support by the body. The upper surface area and the lower surface area comprise an array of blind holes, the blind holes having a diameter of at least 5 um, a depth of at least 5 um, and an aspect ratio of at least 1:1. The method includes forming the array of the blind holes in the upper surface area and the lower surface area of the susceptor and forming surface textures on the surfaces of the susceptor.
Claims20
A susceptor for supporting a substrate inside a processing chamber, the susceptor comprising:
- a body having an upper surface area and a lower surface area;
- a first plurality of blind holes formed in the upper surface area of the body;
- and
- a second plurality of blind holes formed in the lower surface area of the body, wherein at least one blind hole from the first and second plurality of blind holes has a diameter of at least 5 um, a depth of at least 5 um, and an aspect ratio of at least 1:1.
A method for improving emissivity of a susceptor, the method comprising:
- forming a first plurality of blind holes in a lower surface area of the susceptor;
- forming a second plurality of blind holes in an upper surface area of the susceptor, wherein at least one blind hole of the second plurality of the blind holes has a diameter of at least 5 um, a depth of at least 5 um, and an aspect ratio of at least 1:1;
- and
- forming a surface texture on the upper surface area and the lower surface area of the susceptor.
A processing chamber for processing a substrate, the processing chamber comprising:
- a susceptor comprising a body, the body having an upper surface area and a lower surface area;
- and
- a heating lamp operable to heat the susceptor,
- wherein a plurality of blind holes are formed in the upper surface area and the lower surface area, at least one blind hole of the plurality of the blind holes has a diameter of at least 5 um, a depth of at least 5 um, and an aspect ratio of at least 1:1.
Dependencies are inferred from the claim text.