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US 2025/0233084 A1Published application
Semiconductor memory device and method for manufacturing the same
AssigneeKioxia Corporation
InventorKyosuke NANAMI
Life of this patent
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Abstract
A semiconductor memory device according to an embodiment includes: a stacked body in which a plurality of conductive layers and a plurality of insulating layers are alternately stacked one by one; and a plurality of first plate-like portions that penetrate the stacked body in a stacking direction thereof and cross the stacked body in a first direction intersecting the stacking direction, the plurality of first plate-like portions being arranged along the first direction with a gap therebetween.
Claims10
A semiconductor memory device comprising:
- a first stacked body in which a plurality of first insulating layers and a plurality of second insulating layers are alternately stacked one by one;
- a second stacked body in which a plurality of conductive layers and the plurality of second insulating layers are alternately stacked one by one and which is disposed around the first stacked body;
- a plate-like portion that penetrates the second stacked body in a stacking direction of the second stacked body and crosses the second stacked body in a first direction intersecting the stacking direction;
- and
- a widening portion that is provided in the plate-like portion so as to face the first stacked body and has a width larger than a width of the plate-like portion.
2 more elements
A method for manufacturing a semiconductor memory device, comprising:
- forming a first stacked body in which a plurality of first insulating layers and a plurality of second insulating layers are alternately stacked one by one;
- forming a second stacked body in which a plurality of conductive layers and the plurality of second insulating layers are alternately stacked one by one and which is disposed around the first stacked body;
- forming a plate-like portion that penetrates the second stacked body in a stacking direction of the second stacked body and crosses the second stacked body in a first direction intersecting the stacking direction;
- and
- forming a widening portion that is provided in the plate-like portion so as to face the first stacked body and has a width larger than a width of the plate-like portion.
2 more elements
Dependencies are inferred from the claim text.