Composition for forming organic film, method for forming organic film, patterning process, and surfactant
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKeisuke NIIDA, Yasuyuki Yamamoto
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKeisuke NIIDA, Yasuyuki Yamamoto
Estimating the term…
A composition for forming an organic film contains: (A) a material for forming an organic film; (B) an aryl benzyl ether compound having a partial structure represented by the following general formula (B1); and (C) a solvent, where R1 represents a group represented by the following formula (B2-1) or either of groups containing fluorine represented by the following formulae (B2-2), R2 represents a saturated or unsaturated monovalent organic group having 1 to 30 carbon atoms, “a” represents 0 or 1, provided that when “a” is 0, “b” represents 1 to 5 and “c” represents 0 to 4, and when “a” is 1, “b” represents 1 to 7 and “c” represents 0 to 6, and “*” represents an attachment point to another atom.
A composition for forming an organic film, comprising:
A surfactant comprising an aryl benzyl ether compound having a partial structure represented by the following general formula (B1),
Dependencies are inferred from the claim text.