Volume acoustic device and method for producing a volume acoustic device
OwnerChristoph Schellinginventor
Life of this patent
Estimating the term…
Abstract
A volume acoustic device. The volume acoustic device includes a first electrode and a second electrode and a piezoelectric element disposed between the first electrode and the second electrode. The piezoelectric element is configured such that a first electromagnetic signal fed into the first electrode is converted to an acoustic signal in the piezoelectric element, and the acoustic signal is converted back into a second electromagnetic signal in the second electrode. A dielectric layer surrounds the first electrode, the second electrode, and the piezoelectric element, and has a substantially planar surface. At least one separation trench at least partially surrounds the piezoelectric element is formed in the dielectric layer.
Claims12
1-11. (canceled)
A volume acoustic device, comprising
- a first electrode and a second electrode;
- a piezoelectric element disposed between the first electrode and the second electrode, wherein the piezoelectric element is configured such that a first electromagnetic signal fed into the first electrode is converted to an acoustic signal in the piezoelectric element and the acoustic signal is converted back into a second electromagnetic signal in the second electrode;
- a dielectric layer which surrounds the first electrode, the second electrode, and the piezoelectric element, and has a substantially planar surface;
- wherein at least one separation trench that at least partially surrounds the piezoelectric element is formed in the dielectric layer.
A method for producing a volume acoustic device, comprising the following steps:
- providing a substrate;
- configuring a first electrode, a second electrode, and a piezoelectric element disposed between the first electrode and the second electrode, on the substrate, wherein the piezoelectric element is configured such that a first electromagnetic signal fed into the first electrode is converted to an acoustic signal in the piezoelectric element, and the acoustic signal is converted back into a second electromagnetic signal in the second electrode;
- forming a dielectric layer which surrounds the first electrode, the second electrode, and the piezoelectric element, and has a substantially planar surface;
- and
- forming at least one separation trench in the dielectric layer that at least partially surrounds the piezoelectric element.
Dependencies are inferred from the claim text.