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US 2025/0210408 A1Published application
Stage
AssigneeNHK Spring Co., Ltd.
InventorsJun FUTAKUCHIYA, Naoya AIKAWA
Life of this patent
Estimating the term…
Abstract
A stage includes a first metal plate, a second metal plate below the first metal plate, a heat insulating portion including a first space provided in the first metal plate and a second space provided in the second metal plate, and a circulating flow path and a heater with the insulating portion therebetween. In a cross-sectional view, a width of the heat insulating portion in the first metal plate is different from a width of the heat insulating portion in the second metal plate.
Claims14
A stage, comprising:
- a first metal plate comprising a first groove;
- a second metal plate comprising a through hole, below the first metal plate;
- a third metal plate comprising a second groove, below the second metal plate;
- and
- a circulating flow path and a heater with the first groove interposed therebetween,
- wherein the first groove, the through hole, and the second groove are connected to one another.
3 more elements
A stage, comprising:
- a first metal plate comprising a first through hole;
- a second metal plate comprising a second through hole, below the first metal plate;
- a third metal plate comprising a groove, below the second metal plate;
- and
- a circulating flow path and a heater with the first through hole interposed therebetween,
- wherein the first through hole, the second through hole, and the groove are connected to one another.
3 more elements
A stage, comprising:
- a first metal plate comprising a first groove;
- a second metal plate comprising a first through hole, below the first metal plate;
- a third metal plate comprising a second groove, below the second metal plate;
- a circulating flow path and a heater with the first groove interposed therebetween;
- a first heat insulating portion in which the groove, the first through hole, and the second groove are connected to one another;
- and
- in a plan view, a second heat insulating portion overlaps the heater.
4 more elements
Dependencies are inferred from the claim text.