Circuit breaker circuitry with hot switch protection

A circuit breaker circuitry, comprising:

• an input terminal and an output terminal;
• a micro-electromechanical systems (MEMS) switch electrically connected between the input and output terminals, the MEMS switch comprising:
• a conductive beam pivoted over a substrate by a conductive post to tilt in opposite directions,
• first and second contact electrodes formed on the substrate at opposite lateral sides of the conductive post, and
• first and second control electrodes formed on the substrate at opposite lateral sides of the conductive post, wherein each of the first and second control electrodes is disposed laterally between the conductive post and a respective one of the first and second contact electrodes,
• wherein upon activation of the MEMS switch, the conductive beam tilts in a first direction, thereby open circuiting a path between the input terminal and the output terminal over a time period of 0.1-10 us seconds until the MEMS switch reaches an open circuit condition;
• and
• a protective switch electrically connected in parallel to the MEMS switch between the input and output terminals.

A circuit breaker circuitry, comprising:

• an input terminal and an output terminal;
• a plurality of micro-electromechanical systems (MEMS) switches electrically connected in parallel between the input and output terminals,
• each of the MEMS switches comprising:
• a conductive beam pivoted over a substrate by a conductive post to tilt in opposite directions,
• first and second contact electrodes formed on the substrate at opposite lateral sides of the conductive post, and
• first and second control electrodes formed on the substrate at opposite lateral sides of the conductive post, wherein each of the first and second control electrodes is disposed laterally between the conductive post and a respective one of the first and second contact electrodes,
• wherein upon activation of the each of the MEMS switches, the conductive beam tilts in a first direction, thereby open circuiting a path between the input terminal and the output terminal;
• and
• a protective switch electrically connected in parallel to the MEMS switches between the input and output terminals.