Gas delivery system

A gas delivery system comprising:

• a substrate comprising:
• a first substrate portion of a first gas stick, the first substrate portion comprising:
• a first inlet configured to receive a first gas;
• and
• a first base portion of a first component, the first base portion comprising a first component inlet and a first component outlet;
• and
• a first upper portion of the first component, the first upper portion being disposed on the first base portion, wherein the first upper portion is configured to control first flow of the first gas to a chamber of a substrate processing system.

A gas delivery system comprising:

• an additively manufactured substrate comprising:
• a first substrate portion of a first gas stick, the first substrate portion comprising a first inlet configured to receive a first gas, the first substrate portion forming one or more first flow paths configured to route the first gas;
• and
• a second substrate portion of a second gas stick, the second substrate portion comprising a second inlet configured to receive a second gas, the second substrate portion forming one or more second flow paths configured to route at least one of the first gas or the second gas to a chamber of a substrate processing system.