Charging system and method for controlling charging system
AssigneesKawasaki Jukogyo Kabushiki Kaisha, Kawasaki Robotics (USA), Inc.
InventorsHaruhiko TAN, Simon JEYAPALAN, Theodore PHILLIBER, Ryan LE, Avish Ashok BHARWANI, Nobuyasu SHIMOMURA
Life of this patent
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Abstract
A charging system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge; and a charger container configured to accommodate the charger, arranged in a place where a FOUP for accommodating substrates is arranged, and having an opening that is opened toward an interior of a substrate conveyor.
Claims15
A charging system comprising:
- a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles;
- a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge;
- and
- a charger container configured to accommodate the charger, arranged in a place where a FOUP for accommodating substrates is arranged, and having an opening that is opened toward an interior of a substrate conveyor.
A method for controlling a charging system comprising:
- electrostatically charging a particle absorption tool configured to build up a static electric charge so as to absorb particles by using a charger accommodated in a charger container arranged in a place where a FOUP for accommodating substrates is arranged and having an opening that is opened toward an interior of a substrate conveyor;
- and
- absorbing the particles by using the particle absorption tool building up the static electric charge.
Dependencies are inferred from the claim text.