Thin-film liquid metal electrode, its fabricating method using sequential deposition and stretchable electronic device using the electrode fabricated therefrom

Abstract

Provided are a thin-film liquid metal electrode, a method of fabricating the same using a sequential deposition, and a stretchable electronic device using the electrode fabricated therefrom. The thin-film liquid metal electrode may be applied to various application fields, such as a solar cell, a display, a biosensor, and a flexible/stretchable device using the thin-film liquid metal electrode by providing the thin-film liquid metal electrode in which at least two types of liquid metal nanoclusters are sequentially over-layered with an oxide film in therebetween and deposited as thin films on a surface-treated stretchable substrate in an over-layered structure, by fabricating the liquid metal nanoclusters in a no-direct contact structure, and by implementing negative piezoresistivity (NPR) property in which resistance decreases up to 85% during first 50% stretching since an additional electrical path is generated between two liquid metal nanoclusters as the oxide film is ruptured due to mechanical deformation.

Dependencies are inferred from the claim text.