Electro-optical modulator and manufacturing method thereof

An electro-optical modulator, comprising:

• a hybrid waveguide including stacked silicon and nonlinear optical material layers, wherein the silicon layer and the nonlinear optical material layer do not contact each other;
• and
• an electrode including a first electrode and a second electrode disposed on both sides of the hybrid waveguide, with the first and second electrodes extending through a portion of the hybrid waveguide;
• wherein the electro-optical modulator further comprises coupling ends, extending from both ends of the hybrid waveguide, for optical coupling, with at least one of these coupling ends including a tapered structure.

A method for manufacturing an electro-optical modulator, comprising:

• providing a first component, which includes at least a silicon layer and conductive wiring structures located on both sides of the silicon layer;
• providing a second component, which includes a nonlinear optical material layer and conductive wiring structures located on both sides of the nonlinear optical material layer;
• and
• bonding the first component to the second component to form the electro-optical modulator,
• wherein the silicon layer and the nonlinear optical material layer are stacked to form the hybrid waveguide, and the conductive wiring structures on both sides of the silicon layer are electrically connected to those on both sides of the nonlinear optical material layer, thereby forming the electrodes on both sides of the hybrid waveguide,
• and wherein the silicon layer and the nonlinear optical material layer do not contact each other, and the electrodes extend through a portion of the hybrid waveguide.