Metalens assembly and method for manufacturing the same
AssigneeTriple Win Technology(Shenzhen) Co. Ltd.
InventorYI-MOU HUANG
Life of this patent
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Abstract
A method for manufacturing a metasurface lens assembly, comprising the steps of: providing a substrate including a first region, a second region, and a third region connecting the first and second regions; etching the third region to form micron-sized support structures; etching the first region to form nanoscale metasurface lenses connected to the support structures; and removing the support structures to separate the metasurface lenses from the second region, resulting in a metasurface lens assembly. This method significantly enhances the structural strength of the metasurface microstructures, reducing damage during subsequent processing steps. Additionally, a metasurface lens assembly is provided.
Claims14
A method for manufacturing a metasurface lens assembly, comprising:
- providing a substrate comprising a first region, a second region, and a third region connecting the first and second regions;
- etching the third region to form support structures which are micron-sized;
- etching one side of the first region to form metasurface lenses connected to the support structures, the metasurface lenses are nanosized;
- and
- removing the support structures to separate the metasurface lenses from the second region, thereby obtaining the metasurface lens assembly.
A metasurface lens assembly, comprising:
- a body;
- a metasurface lens arranged on one side of the body, the metasurface lens comprising multiple nanoscale protrusions, and the nanoscale protrusions being configured to refract light;
- and
- a moth-eye structure arranged on the other side of the body, and the moth-eye structure being configured to enhance light transmittance of the metasurface lens.
Dependencies are inferred from the claim text.