Plasma source chamber for a spectrometer
AssigneeThermo Fisher Scientific (Bremen) GmbH
InventorsNorbert QUAAS, Ayrat MURTAZIN, Sebastian GEISER, Tobias WOLF, Jan RATHKAMP, Dirk WOHLERS, Mikhail SKOBLIN
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AssigneeThermo Fisher Scientific (Bremen) GmbH
InventorsNorbert QUAAS, Ayrat MURTAZIN, Sebastian GEISER, Tobias WOLF, Jan RATHKAMP, Dirk WOHLERS, Mikhail SKOBLIN
Estimating the term…
A plasma source chamber for use in a spectrometer comprises an inner housing for accommodating a plasma source and an outer housing accommodating the inner housing. The outer housing comprises at least one outer air inlet in a first wall and at least one outer air outlet in a second wall. Walls of the inner and outer housings define a spacing so as to allow a first air flow from the at least one outer air inlet to the at least one outer air outlet through the spacing between the inner and outer housings. The inner housing comprises at least one inner air inlet in a first wall and at least one inner air outlet in a second wall to allow a second air flow from the at least one inner air inlet to the at least one inner air outlet through the inner housing.
A plasma source chamber for use in a spectrometer, the plasma source chamber comprising:
A spectrometer comprising a plasma source chamber, the plasma source chamber comprising:
Dependencies are inferred from the claim text.