Membrane sensor for compensation of an acceleration and corresponding operating method
OwnerJohannes Classeninventor
Life of this patent
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Abstract
A micromechanical membrane sensor, and a method which is suitable for determining a sensor value and/or a sensor variable of the membrane sensor. The sensor value of the membrane sensor is determined such that the weight force or another acceleration onto the membrane is largely compensated.
Claims14
1-12. (canceled)
A membrane sensor having a membrane, comprising
- a first sensor element which detects a first sensor variable as a function of a movement of the membrane;
- and
- a second sensor element which detects a second sensor variable as a function of a weight force;
- wherein the second sensor element is configured such that the second sensor variable represents a weight force acting on the membrane.
A method for determining a sensor value of a membrane sensor having a membrane, wherein the membrane sensor includes a first sensor element configured to detect a first sensor variable as a function of a movement of the membrane, and a second sensor element configured to detect a second sensor variable which represents a weight force acting on the membrane, the method comprising:
- determining the sensor value as a function of the first sensor variable and the second sensor variable.
Dependencies are inferred from the claim text.