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US 2025/0197992 A1Published application
Display apparatus manufacturing apparatus and display apparatus manufacturing method
AssigneeSamsung Display Co., Ltd.
InventorSungmin Huch
Life of this patent
Estimating the term…
Abstract
A display apparatus manufacturing apparatus includes a chamber, a susceptor arranged in the chamber and supporting a display substrate, a head unit arranged in the chamber and spraying a cleaning gas into the chamber, a cleaning gas supply unit supplying the cleaning gas to the head unit, a pressure adjusting unit adjusting a pressure in the chamber, and a control unit determining an end point of cleaning.
Claims29
A display apparatus manufacturing apparatus comprising:
- a chamber;
- a susceptor arranged in the chamber and supporting a display substrate;
- a head unit arranged in the chamber and spraying a cleaning gas into the chamber;
- a cleaning gas supply unit supplying the cleaning gas to the head unit;
- a pressure adjusting unit adjusting a pressure in the chamber;
- and
- a control unit determining an end point of cleaning,
- wherein the pressure adjusting unit comprises:
- a guide pipe connected to the chamber and comprising a pipe flow path communicating with an inside of the chamber;
- a pressure adjusting pump connected to the guide pipe and applying a designated pressure to the pipe flow path such that a gas in the chamber flows to an outside thereof;
- and
- a pressure adjusting valve connected to the guide pipe and opening or closing the pipe flow path such that the pressure in the chamber is within a designated range,
- wherein the control unit calculates an opening ratio that is a ratio of a cross-sectional area of a passage opening opened by the pressure adjusting valve to a cross-sectional area of the pipe flow path, and determines that the cleaning has been ended, when an hourly variation of the opening ratio is within a designated range.
10 more elements
A display apparatus manufacturing method comprising:
- carrying out a display substrate to an outside of a chamber on a susceptor arranged in the chamber;
- supplying a cleaning gas to a head unit by a cleaning gas supply unit;
- spraying the cleaning gas into the chamber by the head unit;
- conducting a pressure adjusting operation of adjusting a pressure in the chamber by a pressure adjusting unit;
- and
- determining an end point of cleaning by a control unit,
- wherein the pressure adjusting operation comprises:
- applying a designated pressure to a pipe flow path by a pressure adjusting pump arranged at a guide pipe including the pipe flow path communicating with an inside of the chamber;
- and
- opening or closing the pipe flow path by a pressure adjusting valve connected to the guide pipe such that the pressure in the chamber is within a designated range,
- wherein the control unit calculates an opening ratio that is a ratio of a cross-sectional area of a passage opening opened by the pressure adjusting valve to a cross-sectional area of the pipe flow path, and determines that the cleaning has ended when an hourly variation of the opening ratio is within a designated range.
8 more elements
An electronic device, comprising:
- a display apparatus manufactured by a display apparatus manufacturing apparatus, wherein the display apparatus manufacturing apparatus comprises, a chamber;
- a susceptor arranged in the chamber and supporting a display substrate;
- a head unit arranged in the chamber and spraying a cleaning gas into the chamber;
- a cleaning gas supply unit supplying the cleaning gas to the head unit;
- a pressure adjusting unit adjusting a pressure in the chamber;
- and
- a control unit determining an end point of cleaning,
- wherein the pressure adjusting unit comprises:
- a guide pipe connected to the chamber and comprising a pipe flow path communicating with an inside of the chamber;
- a pressure adjusting pump connected to the guide pipe and applying a designated pressure to the pipe flow path such that a gas in the chamber flows to an outside thereof;
- and
- a pressure adjusting valve connected to the guide pipe and opening or closing the pipe flow path such that the pressure in the chamber is within a designated range,
- wherein the control unit calculates an opening ratio that is a ratio of a cross-sectional area of a passage opening opened by the pressure adjusting valve to a cross-sectional area of the pipe flow path, and determines that the cleaning has been ended, when an hourly variation of the opening ratio is within a designated range.
10 more elements
Dependencies are inferred from the claim text.