Method of manufacturing silicon nitride substrate

Abstract

In a case of manufacturing a silicon nitride substrate by nitriding a stacked body made of a plurality of stacked sheet-shaped molded bodies each containing silicon, productivity of the silicon nitride substrate is improved. As means for this, a method of manufacturing the silicon nitride substrate is used, the method nitriding a stacked body made of 5 or more and 20 or less stacked sheet-shaped molded bodies each having a sheet shape and containing silicon by conveying the stacked body from a carry-in port to a carry-out port in a continuous heating furnace including the carry-in port, the carry-out port, a heating unit for heating a space between the carry-in port and the carry-out port, and a nitrogen supply unit for supplying nitrogen into the space between the carry-in port and the carry-out port.

Dependencies are inferred from the claim text.