Actuator, liquid ejection head, and method for manufacturing actuator
OwnerYutaka Setomotoinventor
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Abstract
An actuator has a first electrode, a piezoelectric body, and a second electrode that are on a surface of a substrate in this order and an insulating film covering at least a side surface of the piezoelectric body. The actuator has a plurality of slanted surfaces slanted relative to the substrate at an end portion of a surface of the first electrode which is opposite from the substrate, and an angle between the substrate and a first slanted surface of the plurality of slanted surfaces which is farthest away from the substrate is smaller than an angle between the substrate and any other one of the slanted surfaces.
Claims17
An actuator comprising:
- a first electrode, a piezoelectric body, and a second electrode that are on a surface of a substrate in this order and
- an insulating film covering at least a side surface of the piezoelectric body, wherein
- the actuator has a plurality of slanted surfaces slanted relative to the substrate at an end portion of a surface of the first electrode which is opposite from the substrate, and
- an angle between the substrate and a first slanted surface of the plurality of slanted surfaces which is farthest away from the substrate is smaller than an angle between the substrate and any other one of the slanted surfaces.
A liquid ejection head that ejects liquid by driving an actuator having a first electrode, a piezoelectric body, and a second electrode that are on a surface of a substrate in this order and an insulating film covering at least a side surface of the piezoelectric body, wherein
- the actuator has a plurality of slanted surfaces slanted relative to the substrate at an end portion of a surface of the first electrode which is opposite from the substrate, and
- an angle between the substrate and a first slanted surface of the plurality of slanted surfaces which is farthest away from the substrate is smaller than an angle between the substrate and any other one of the slanted surfaces.
A method for manufacturing an actuator, the method comprising:
- forming a film on a surface of a substrate;
- forming a first electrode by dry-etching the film;
- forming a piezoelectric body on the first electrode;
- forming a second electrode on the piezoelectric body;
- and
- forming an insulating film covering at least a side surface of the piezoelectric body, wherein
- in the forming a first electrode, a plurality of slanted surfaces slanted relative to the substrate are formed at an end portion of a surface of the first electrode which is opposite from the substrate, and
- an angle between the substrate and a first slanted surface of the plurality of slanted surfaces which is farthest away from the substrate is smaller than an angle between the substrate and any other one of the slanted surfaces.
Dependencies are inferred from the claim text.