Method of manufacturing structure having electrode and anodized part
AssigneeMikro Mesa Technology Co., Ltd.
InventorsLi-Yi CHEN, Chieh-Ting CHEN
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Abstract
A method of manufacturing a structure having an electrode and an anodized part includes: forming a top metal layer on a substrate; forming a top patterned photoresist on the top metal layer to expose a portion of a top surface of the top metal layer, in which the top patterned photoresist has a first mask portion and a second mask portion thicker than the first mask portion; anodizing the top metal layer through the top patterned photoresist to form an anodized segment; removing the first mask portion after the anodizing; and etching the top metal layer through the top patterned photoresist after the removing the first mask portion to form a top metal pattern.
Claims22
A method of manufacturing a structure having an electrode and an anodized part, comprising:
- forming a top metal layer on a substrate;
- forming a top patterned photoresist on the top metal layer to expose a portion of a top surface of the top metal layer, wherein the top patterned photoresist has a first mask portion and a second mask portion thicker than the first mask portion;
- anodizing the top metal layer through the top patterned photoresist to form an anodized segment;
- removing the first mask portion after the anodizing;
- and
- etching the top metal layer through the top patterned photoresist after the removing the first mask portion to form a top metal pattern.
Dependencies are inferred from the claim text.