Multifaceted target for an ion source
AssigneeAxcelis Technologies, Inc.
InventorSteve T. Drummond
Life of this patent
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Abstract
A target body includes a plurality of wave-shaped layers sandwiched between an upper target body and a lower target body. Adjacent layers of the plurality of wave-shaped layers are offset such that peaks of one layer interface with valleys of an adjoining layer, thereby forming a plurality of interstitial gas flow channels. The target body defines a central bore along a central axis of the target body that extends between opposite planar ends of the target body, and the plurality of interstitial gas flow channels are open to the central bore.
Claims20
A target for an ion source comprising:
- a target body comprising a plurality of wave-shaped layers sandwiched between an upper target body and a lower target body, wherein adjacent layers of the plurality of wave-shaped layers are offset such that peaks of one layer interface with valleys of an adjoining layer, thereby forming a plurality of interstitial gas flow channels;
- wherein the target body defines a central bore along a central axis of the target body that extends between opposite planar ends of the target body, and the plurality of interstitial gas flow channels are open to the central bore.
A method comprising:
- directing a stream of electrons and ions at a repeller and a target body that includes a metal, wherein the target body comprises a plurality of wave-shaped layers sandwiched between an upper target body and a lower target body, adjacent layers of the plurality of wave-shaped layers are offset such that peaks of one layer interface with valleys of an adjoining layer, thereby forming a plurality of interstitial gas flow channels, and the target body defines a central bore along a central axis of the target body that the repeller is disposed within and the plurality of interstitial gas flow channels are open to the central bore;
- and
- eroding metal ions from the target body using the stream of electrons and ions.
A method comprising:
- forming a target body using additive manufacturing, wherein the target body comprises a plurality of wave-shaped layers sandwiched between an upper target body and a lower target body, and adjacent layers of the plurality of wave-shaped layers are offset such that peaks of one layer interface with valleys of an adjoining layer, thereby forming a plurality of interstitial gas flow channels;
- wherein the target body defines a central bore along a central axis of the target body that extends between opposite planar ends of the target body, and the plurality of interstitial gas flow channels are open to the central bore.
Dependencies are inferred from the claim text.