Co-sputtering rare earth rotating target material, and preparation method, and application method therefor

A co-sputtering rare earth rotating target material, comprising a back tube and a plurality of sections of target tubes welded to the outside of the back tube;

• wherein the back tube and the plurality of sections of target tubes welded to the outside of the back tube are concentric cylindrical structures;
• the plurality of sections of target tubes welded to the outside of the back tube comprise two sections of end target tubes arranged at an axial end of the target material, and a plurality of sections of rare earth target tubes and a plurality of sections of co-sputtering target tubes which are arranged between the two sections of end target tubes and with a target material along an axial middle region;
• the plurality of sections of rare earth target tubes are spaced apart from the plurality of sections of co-sputtering target tubes, and the target tubes are mutually assembled via welding;
• and
• the co-sputtering target tubes are selected from at least one of aluminum, copper, nickel, iron, and praseodymium target tubes, and the end target tubes are non-rare earth target tubes or rare earth target tubes.