Neutral beam and extreme ultraviolet light-generating device and method

A neutral beam and extreme ultraviolet (EUV) light-generating device comprising:

• an ion beam source configured to extract ions from first plasma to generate an ion beam and to output the ion beam in a first direction;
• a first electron beam source configured to generate a first electron beam incident on the ion beam to reduce scattering of the ion beam;
• a second electron beam source configured to generate and output a second electron beam, which collides with the ion beam;
• a first electromagnetic control device configured to control a traveling direction of the second electron beam to cause the second electron beam to collide head-on with the ion beam;
• and
• a second electromagnetic control device configured to maintain neutral atoms generated by the second electron beam colliding head-on with the ion beam and to remove ions, to generate a neutral beam of the maintained neutral atoms, the neutral beam being directed in the first direction.

A neutral beam and extreme ultraviolet (EUV) light-generating device comprising:

• an ion beam source configured to extract ions from first plasma to generate an ion beam and to output the ion beam in a first direction;
• a first electron beam source configured to generate a first electron beam incident on the ion beam to reduce scattering of the ion beam;
• a second electron beam source configured to generate and output a second electron beam, which collides with the ion beam;
• a first electromagnetic control device configured to control a traveling direction of the second electron beam to cause the second electron beam to collide head-on with the ion beam;
• and
• an EUV collector configured to collect EUV light generated by the second electron beam colliding head-on with the ion beam and to output the EUV light in one direction and in a plane direction perpendicular to the first direction.