Vaporization device, material state determination device, material state determination method for vaporization device, and material state determination program for vaporization device
AssigneeHORIBA STEC, Co., Ltd.
InventorsToshihiro IKEYAMA, Takao WATANABE
Life of this patent
Estimating the term…
Abstract
A vaporizer that vaporizes a material, a flow rate control device including a flow rate sensor that measures a flow rate of a material gas generated by the vaporizer, and a determination unit that determines that the material gas has returned to a state before the vaporization on the basis of a transient response of the flow rate measured by the flow rate sensor are included.
Claims11
A vaporization device comprising:
- a vaporizer that vaporizes a material;
- a flow rate control device including a flow rate sensor that measures a flow rate of a material gas generated by the vaporizer;
- and
- a determination unit that determines that the material gas has returned to a state before the vaporization on a basis of transient response data that is flow rate data at a time of a transient response measured by the flow rate sensor.
A material state determination device that is a liquefaction determination device used in a vaporization device including a vaporizer that vaporizes a material and a flow rate control device including a flow rate sensor that measures a flow rate of a material gas generated by the vaporizer, the material state determination device comprising:
- a determination unit that determines that the material gas has returned to a state before the vaporization on a basis of transient response data that is flow rate data at a time of a transient response measured by the flow rate sensor.
A material state determination method for a vaporization device including a vaporizer that vaporizes a material and a flow rate control device including a flow rate sensor that measures a flow rate of a material gas generated by the vaporizer, the material state determination method comprising:
- determining that the material gas has returned to a state before the vaporization on a basis of transient response data that is flow rate data at a time of a transient response measured by the flow rate sensor.
A non-transitory storage medium storing a material state determination program for a vaporization device including a vaporizer that vaporizes a material and a flow rate control device including a flow rate sensor that measures a flow rate of a material gas generated by the vaporizer, the material state determination program being executable by a computer to cause the computer to:
- determine that the material gas has returned to a state before the vaporization on a basis of transient response data that is flow rate data at a time of a transient response measured by the flow rate sensor.
Dependencies are inferred from the claim text.