Eco-efficiency monitoring and exploration platform for semiconductor manufacturing

A system comprising:

• a memory;
• and
• a processing device, coupled to the memory, to:
• receive first data indicating an update to a substrate fabrication system to operate according to one or more process procedures, wherein the update comprises at least one of:
• i.) an alteration of a scheduled operational mode of a support asset of the substrate fabrication system to a shared operational mode;
• or
• ii.) a modification of a first gas to a second gas to be used by the substrate fabrication system;
• input the first data into a digital replica configured to estimate environmental resource usage data indicative of an amount of one or more resources consumed based at least in part on processing the first data;
• receive estimated environmental resource usage data output from the digital replica corresponding to performing the one or more process procedures by the substrate fabrication system incorporating the update;
• and
• provide the estimated environmental resource usage data for display on a graphical user interface (GUI).

A non-transitory machine-readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to:

• receive first data indicating an update to a substrate fabrication system to operate according to one or more process procedures, wherein the update comprises at least one of:
• i.) an alteration of a scheduled operational mode of a support asset of the substrate fabrication system to a shared operational mode;
• or
• ii.) a modification of a first gas to a second gas to be used by the substrate fabrication system;
• input the first data into a digital replica configured to estimate environmental resource usage data indicative of an amount of one or more resources consumed based at least in part on processing the first data;
• receive estimated environmental resource usage data output from the digital replica corresponding to performing the one or more process procedures by the substrate fabrication system incorporating the update;
• and
• provide the estimated environmental resource usage data for display on a graphical user interface (GUI).