Light source apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorYuki ASHIDA
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AssigneeSCREEN Holdings Co., Ltd.
InventorYuki ASHIDA
Estimating the term…
A light source apparatus includes an optical amplifier, a spectroscopic element, a spatial phase modulating element, and a controller. The spectroscopic element separates light from the optical amplifier according to wavelengths. The spatial phase modulating element includes a base part and a plurality of grating elements that reflect the light separated by the spectroscopic element. The spatial phase modulating element relatively displaces at least a part of grating elements with respect to the base part and thereby performs phase modulation on the light separated by the spectroscopic element, and emits diffracted light along an incident optical path from the spectroscopic element regarding a part of the wavelengths. The diffracted light generates the light having the part of the wavelengths in the spectroscopic element. The light having the part of the wavelengths subjected to a plurality of times of amplification by the optical amplifier is output.
A light source apparatus comprising:
Dependencies are inferred from the claim text.