Metal storage device, metal injection system including the same, and substrate processing method using the same

A metal storage device, comprising:

• a storage body defining a storage space, the storage body including a first axis as a central axis, the first axis extending in a first direction;
• and
• an ultrasonic measurement unit configured to be combined with an outer surface of the storage body, the ultrasonic measurement unit configured to transceive an ultrasonic wave that propagates through the storage body as a medium, and
• wherein the ultrasonic measurement unit includes:
• an ultrasonic generator configured to generate the ultrasonic wave in the storage body;
• and
• an ultrasonic receiver opposite to the ultrasonic generator, the ultrasonic receiver at a level different from a level of the ultrasonic generator.

A metal storage device, comprising:

• a storage body defining a storage space, the storage body including a first axis as a central axis, the first axis extending in a first direction;
• a heater combined with an outer surface of the storage body, the heater being configured to apply heat to the storage space;
• and
• a gas pump configured to introduce an inert gas to the storage body.