Substrate processing apparatus and substrate processing method
AssigneeSemes Co., Ltd.
InventorsSang Min LEE, Dong Min PARK, Myung Chan CHO, Ju Yeon SONG
Life of this patent
Estimating the term…
Abstract
Proposed is a substrate processing apparatus for processing a substrate, substrate processing apparatus including: a liquid processing chamber performing liquid processing on a substrate by supplying processing liquid to the substrate; a drying chamber drying the substrate; a transferring robot transferring the substrate from the liquid processing chamber to the drying chamber; and an inspection unit inspecting a state of the drying chamber.
Claims15
A substrate processing apparatus for processing a substrate, comprising:
- a liquid processing chamber performing liquid processing on a substrate by supplying processing liquid to the substrate;
- a drying chamber drying the substrate;
- a transferring robot transferring the substrate from the liquid processing chamber to the drying chamber;
- and
- an inspection unit inspecting a state of the drying chamber.
-19. (canceled)
A substrate processing apparatus for processing a substrate, comprising:
- a liquid processing chamber performing liquid processing on a substrate by supplying processing liquid to the substrate;
- a drying chamber drying the substrate and comprising an upper body and a lower body providing a processing space therein by combining with each other and an actuator changing positions between a state in which the processing space is closed and a state in which the processing space is open by actuating the upper body or the lower body;
- a film provided in a partial region of at least any one of the upper body and the lower body;
- a transferring robot transferring the substrate from the liquid processing chamber to the drying chamber;
- a control unit controlling the transferring robot to inspect a state of the drying chamber when the drying chamber is open;
- and
- an inspection unit inspecting a foreign substance state of the drying chamber,
- wherein the inspection unit comprises:
- a camera obtaining image information and inspecting a state of the film by photographing an inside of the drying chamber, and installed on the transferring robot;
- a light source unit emitting light of the band of visible light or ultraviolet rays to a photographing region of the camera in the drying chamber, and installed on the transferring robot;
- and
- an image analyzer detecting whether there is the foreign substance from the image information and performing the inspection while a substrate to be loaded into the drying chamber is processed in the liquid processing chamber.
Dependencies are inferred from the claim text.