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US 2025/0186929 A1Published application
Exahust gas treatment apparatus
AssigneeEbara Corporation
InventorsKazumasa HOSOTANI, Kazutomo MIYAZAKI, Takayuki TOMII, Satoru NAKAMURA, Keisuke MATSUSHIMA, Takashi KYOTANI
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Abstract
An exhaust gas treatment apparatus capable of eliminating an adverse effect of a processing gas is disclosed. The exhaust gas treatment apparatus includes a gas treatment reactor having a flow-path forming wall, and a double-pipe structure. The double-pipe structure includes an inner cylinder into which at least a part of the flow-path forming wall is inserted, and an outer cylinder disposed outside the inner cylinder.
Claims11
An exhaust gas treatment apparatus comprising:
- a gas treatment reactor having a flow-path forming wall that forms a flow path for a processing gas that has been introduced;
- and
- a double-pipe structure that surrounds the gas treatment reactor, the double-pipe structure including:
- an inner cylinder into which at least a part of the flow-path forming wall is inserted;
- and
- an outer cylinder disposed outside the inner cylinder.
3 more elements
Dependencies are inferred from the claim text.