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US 2025/0183009 A1Published application
Metallic articles, semiconductor processing systems having metallic articles, and methods of making metallic articles
AssigneeASM IP Holding B.V.
InventorsAmin Azimi, Xing Lin
Life of this patent
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Abstract
A method of making a metallic article includes forming a workpiece body from a bulk metallic material, forming a metallic oxide layer from the bulk metallic material overlaying the bulk metallic material by exposing the bulk metallic material to ozone (O3), and depositing a ceramic layer onto the metallic oxide layer. The bulk metallic material includes one of aluminum and nickel, and metallic articles and semiconductor processing systems including metallic articles are also described.
Claims21
A method of making a metallic article, comprising:
- forming a workpiece body from a bulk metallic material, wherein the bulk metallic material includes one of aluminum and nickel;
- forming a metallic oxide layer overlaying the bulk metallic material from the bulk metallic material by exposing the bulk metallic material to ozone (O3);
- and
- depositing a ceramic layer onto the metallic oxide layer.
1 more element
A metallic article, comprising:
- a workpiece body formed from a bulk metallic material;
- a metallic oxide layer overlaying the bulk metallic material;
- and
- a ceramic layer overlaying the metallic oxide layer, wherein the metallic oxide layer is an oxide formed from the bulk metallic material forming the workpiece body.
1 more element
Dependencies are inferred from the claim text.