Mass flow control system for polysilicon granules

A system, comprising:

• a granular material supply;
• a discharge head in fluid communication with the granular material supply;
• a pan positioned beneath the discharge head to receive granular material discharged from the discharge head, the pan comprising a first end portion and a second end portion;
• a flow regulator conduit having an inlet opening and an outlet opening, the second end portion of the pan being received in the inlet opening of the flow regulator conduit;
• wherein the discharge head comprises an internal nozzle downstream of the inlet and an internal chamber downstream of the nozzle and upstream of the outlet of the discharge head, and the discharge head further comprises vent passages to vent gas from the granular material, the vent passages being in fluid communication with the internal chamber of the discharge head.