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AssigneeEntegris, Inc.
InventorsRuss V. Raschke, Brian Wiseman, Matthew Reber
Estimating the term…
Reticle containers include a rotating latch including a spring. The spring provides force bringing the segments of the reticle container towards one another such that a reticle in the container is clamped between the container segments. The rotating latch can include a head as part of an assembly on one of a cover or a baseplate of the reticle container, with a slot configured to accommodate the head provided on the other of the cover or baseplate. The head can be disposed at an end of a shaft, with the shaft connected to a base, which is contacted by spring providing force such that the contact of the head with the other of the cover or baseplate provides clamping force to a reticle stored between the cover and baseplate.
A method of closing a reticle container, comprising passing a head of a rotatable latch through an aperture provided on a first container segment and rotating the rotatable latch such that the head engages a retention recess intersecting the aperture.
Dependencies are inferred from the claim text.