Semiconductor optical modulator
AssigneeMitsubishi Electric Corporation
InventorsEitaro ISHIMURA, Harunaka YAMAGUCHI, Akitsugu NIWA
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Abstract
A semiconductor optical modulator is formed by stacking a plurality of semiconductor layers including an optical modulation layer on a semiconductor substrate and emits light by modulating an intensity or a phase of light incident on the optical modulation layer. The optical modulation layer is formed using a digital alloy in which the semiconductor layers having a layer thickness of two or more atomic layers and having different constituent elements or composition ratios are alternately and repeatedly stacked.
Claims16
A semiconductor optical modulator that is formed by stacking a plurality of semiconductor layers including an optical modulation layer on a semiconductor substrate and emits light by modulating an intensity or a phase of light incident on the optical modulation layer, the semiconductor optical modulator comprising the optical modulation layer, wherein
- the optical modulation layer is formed by alternately stacking a quantum well layer and a barrier layer having a band gap larger than that of the quantum well layer, and
- the quantum well layer is formed using a digital alloy in which the semiconductor layers having a layer thickness of two or more atomic layers and having different constituent elements or composition ratios are alternately and repeatedly stacked.
(canceled)
A semiconductor optical modulator that is formed by stacking a plurality of semiconductor layers including an optical modulation layer on a semiconductor substrate and emits light by modulating an intensity or a phase of light incident on the optical modulation layer, the semiconductor optical modulator comprising the optical modulation layer, wherein
- the optical modulation layer is a semiconductor layer that is not formed with a quantum well and has a thickness of 20 nm or more and 500 nm or less and is formed using a digital alloy in which the semiconductor layers having a layer thickness of two or more atomic layers and having different constituent elements or composition ratios are alternately and repeatedly stacked.
Dependencies are inferred from the claim text.