Sealed microelectromechanical membrane device
AssigneeSTMicroelectronics International N.V.
InventorsMark Andrew SHAW, Lorenzo BALDO, Filippo DANIELE, Silvia ADORNO
Life of this patent
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Abstract
A microelectromechanical membrane sensor includes: a supporting body, containing semiconductor material and having a recess in a face; a platform, housed in the recess at a distance from the supporting body; a flexure, connecting the platform to the supporting body and configured to keep the platform suspended in the recess. A gap extends between the supporting body, the platform and the flexure. A membrane is housed in the platform and delimits a buried cavity incorporated in the platform. A sealing strip extends on the supporting body, on the platform and on the flexure along the gap.
Claims20
A microelectromechanical membrane sensor, comprising:
- a supporting body of semiconductor material and having a recess in a face;
- a platform, in the recess at a distance from the supporting body;
- a flexure, connecting the platform to the supporting body and configured to keep the platform suspended in the recess, wherein a gap extends between the supporting body, the platform and the flexure;
- a membrane in the platform and delimiting a buried cavity incorporated in the platform;
- and
- a sealing strip extending on the supporting body, on the platform and on the flexure along the gap.
A process for manufacturing a microelectromechanical membrane sensor, comprising:
- in a wafer containing semiconductor material, forming a recess in a face, a platform, housed in the recess at a distance from a supporting body, and a flexure, connecting the platform to the supporting body and configured to keep the platform suspended in the recess, wherein a gap extends between the supporting body, the platform and the flexure;
- forming a membrane housed in the platform and delimiting a buried cavity incorporated in the platform;
- and
- forming a sealing strip, extending on the supporting body, on the platform and on the flexure along the gap.
A device, comprising:
- a substrate having a recess in a first surface, the recess having a second surface opposite the first surface;
- a gap delimiting inner surfaces of the substrate, the gap extending from the first surface of the substrate to the second surface of the recess;
- a suspended platform over the second surface of the recess;
- an extension coupling the suspended platform to the substrate, the extension extending from a first inner surface of the substrate, the first inner surface transverse the first surface of the substrate;
- a buried cavity in the suspended platform and over the second surface of the recess;
- and
- a sealing strip on the gap.
Dependencies are inferred from the claim text.