Piezoelectric transducer having tapered cantilever

A system comprising:

• a case;
• an integrated circuit;
• and
• a transducer device coupled to the integrated circuit, wherein the integrated circuit and the transducer device are covered by the case, wherein the transducer device includes:
• a substrate having an opening through the substrate;
• a first tapered cantilever having a first edge and a second edge, wherein the first edge is opposite to the second edge, wherein the first edge is on the substrate, wherein at least part of the second edge is suspended over the opening, the second edge being longer than the first edge, and the first tapered cantilever including first electrodes electrically coupled to the integrated circuit;
• and
• a second tapered cantilever having a third edge and a fourth edge, wherein the third edge is opposite to the fourth edge, wherein the third edge is on the substrate, wherein at least part of the fourth edge is suspended over the opening, the fourth edge being longer than the third edge, and the second tapered cantilever including second electrodes electrically coupled to the integrated circuit.

A method comprising:

• forming a substrate having an opening through the substrate;
• forming a first tapered cantilever having a first edge and a second edge, wherein the first edge is opposite to the second edge, wherein the first edge is on the substrate, wherein at least part of the second edge is suspended over the opening, the second edge being longer than the first edge;
• and
• forming a second tapered cantilever having a third edge and a fourth edge, wherein the third edge is opposite to the fourth edge, wherein the third edge is on the substrate, wherein at least part of the fourth edge is suspended over the opening, the fourth edge being longer than the third edge.