Acoustic wave devices with common ceramic substrate
AssigneeSkyworks Global Pte. Ltd.
InventorsKwang Jae Shin, Hiroyuki Nakamura
Life of this patent
Estimating the term…
Abstract
An acoustic wave component is disclosed. The acoustic wave component can include a bulk acoustic wave resonator and a surface acoustic wave device. The bulk acoustic wave resonator can include a first portion of a ceramic substrate, a first piezoelectric layer positioned on the ceramic substrate, and electrodes positioned on opposing sides of the first piezoelectric layer. The surface acoustic wave device can include a second portion of the ceramic substrate, a second piezoelectric layer positioned on the ceramic substrate, and an interdigital transducer electrode on the second piezoelectric layer.
Claims21
(canceled)
An acoustic wave component comprising:
- a bulk acoustic wave resonator including a first piezoelectric layer;
- and
- a surface acoustic wave device including a second piezoelectric layer and an interdigital transducer electrode on the second piezoelectric layer, the first piezoelectric layer and the second piezoelectric layer being over a common ceramic substrate, and the bulk acoustic wave resonator and the surface acoustic wave device being included in a filter configured to filter a radio frequency signal.
A bulk acoustic wave resonator comprising:
- a ceramic substrate;
- a piezoelectric layer over the ceramic substrate;
- first and second electrodes on opposing sides of the piezoelectric layer;
- an air cavity between the first electrode and the ceramic substrate;
- and
- an acoustic mirror.
An acoustic wave component comprising:
- a bulk acoustic wave resonator including a first piezoelectric layer;
- and
- a surface acoustic wave device including a second piezoelectric layer and an interdigital transducer electrode on the second piezoelectric layer, the first piezoelectric layer and the second piezoelectric layer being over a common glass substrate, and the bulk acoustic wave resonator and the surface acoustic wave device being included in a filter configured to filter a radio frequency signal.
Dependencies are inferred from the claim text.