Line narrowing laser device, and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorMasakazu HATTORI
Life of this patent
Estimating the term…
Abstract
A line narrowing laser device includes a laser resonator including an output coupling mirror and a line narrowing module that includes a prism and a grating that has a reflection surface having a concave shape; a laser chamber including a pair of discharge electrodes, and arranged on an optical path of the laser resonator; a power source configured to apply, to the discharge electrodes, a high voltage pulse whose repetition frequency is variable; a wavefront adjuster including the output coupling mirror; a spectrum detector configured to measure a spectral line width of pulse laser light output from the output coupling mirror; and a processor configured to control the wavefront adjuster based on the measured spectral line width.
Claims20
A line narrowing laser device comprising:
- a laser resonator including an output coupling mirror and a line narrowing module that includes a prism and a grating that has a reflection surface having a concave shape;
- a laser chamber including a pair discharge electrodes, and arranged on an optical path of the laser resonator;
- a power source configured to apply, to the discharge electrodes, a high voltage pulse whose repetition frequency is variable;
- a wavefront adjuster including the output coupling mirror;
- a spectrum detector configured to measure a spectral line width of pulse laser light output from the output coupling mirror;
- and
- a processor configured to control the wavefront adjuster based on the measured spectral line width.
An electronic device manufacturing method, comprising:
- generating pulse laser light using a line narrowing laser device;
- outputting the pulse laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
- the line narrowing laser device including:
- a laser resonator including an output coupling mirror and a line narrowing module that includes a prism and a grating that has a reflection surface having a concave shape;
- a laser chamber including a pair of discharge electrodes, and arranged on an optical path of the laser resonator;
- a power source configured to apply, to the discharge electrodes, a high voltage pulse whose repetition frequency is variable;
- a wavefront adjuster including the output coupling mirror;
- a spectrum detector configured to measure a spectral line width of the pulse laser light output from the output coupling mirror;
- and
- a processor configured to control the wavefront adjuster based on the measured spectral line width.
Dependencies are inferred from the claim text.