Assistance device, assistance method and non-transitory computer-readable medium storing assistance program

Abstract

An assistance device assists a maintenance work for one or a plurality of substrate processing apparatuses. Further, the assistance device acquires deviation degree information. The deviation degree information represents respective degrees of deviation between a plurality of respective processing information pieces and a plurality of actually collected respective processing information pieces. The plurality of respective processing information pieces are predicted based on invariant relationships in regard to a plurality of processing information pieces representing operations or states related to a process for a substrate in each of one or a plurality of substrate processing apparatuses and a plurality of processing information pieces that are actually collected from the substrate processing apparatus. Further, the assistance device generates assistance information related to a maintenance work for the substrate processing apparatus based on the deviation degree information.

Dependencies are inferred from the claim text.